Sagnik's Home

Members: Sagnik Pal, Sarah Maley (Air Force Research Lab., Ohio)
Sponsor(s): NSF

Objective

Computation efficient and accurate compact thermal model of electrothermally actuated micromirror.

Technical Approach

The Arnoldi process for model order reduction of a finite element thermal model
Comparison of reduced order model with finite element model and thermal imaged of micromirror

Figure 1: SEM of electrothermal micromirror

Figure 2: Thermal image of electrothermal micromirror (obtained by Sarah Maley, AFRL, Ohio)

Results:

Figure 3: Comparison of reduced order model with finite element simulations

Figure 4: Decay in device response at low frequency agrees well with reduced order model of order 2.

Applications:

Fast and efficient simulation of electrothermal micromirrors for arbitrary actuation voltage
Open-loop and closed-loop control

Publications:

•

S. Pal, H. Xie, “Parametric dynamic compact thermal model of an electrothermally actuated micromirror,” Journal of Micromechanics and Microengineering, Vol. 19, 065007 (2009).

S. Pal, K. Jia, S. Maley, and H. Xie, “Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device,” presented at the SPIE Photonics West Conference, San Jose, CA, 19-24 January, 2008.