Linear Scanning of 1D Electrothermal Micromirrors


Sponsor(s): NSF
Objective
  • Actuating an electrothermal micromirror at constant angular velocity
Approach
  • Custom actuation waveform was derived by two methods:
    • Empirical
    • Model based waveform generation
 

 

Results:

 
Applications:
  •  Linear scanning in sample arm of dental OCT, bar code readers etc

Publications:

  • S. Pal, H. Xie, "Pre-shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms," IEEE Journal of Quantum Electronics, In Press, 201
  • S. Pal, H. Xie, “Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.
  • K. Jia, L. Wu, S. Pal, D. Hamilton, H. Xie, “Dental Optical Coherence Tomography Employing Miniaturized MEMS-based Imaging Probe,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.

 

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