Modeling of Electrothermal
Micromirrors Objectives
Approach
|
Figure 1: Comprehensive model schematic of an electrothermal micromirror
-
Thermal modeling
- Finite element model
- Numerical reduced order model
- Parametric lumped element model
- Distributed model that draws upon similarities between heat flow and signal flow in a transmission line
-
Mechanical model
- Newtonian approach
- Lagrangian approach
-
Comprehensive model implementation
- SIMULINK
- SPICE
Accomplishments
- Efficient reduced order thermal model for 1D electrothermal micromirror
- Transmission-line thermal model for electrothermal micromirrors
- Linear scanning of 1D micromirrors by using a special waveform
- Optimization of
thermal bimorph actuator for 2D micromirrors
- Design of Large-Vertical-Displacement mirrors with
purely vertical and purely rotational resonant modes
Journal Papers:
- S. Pal, H. Xie, "Pre-shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms," IEEE Journal of Quantum Electronics, In Press, 2010.
- S. Pal, H. Xie, “Distributed and lumped element models for a bimorph-actuated micromirror,” Journal of Micromechanics and Microengineering, Vol. 20 (2010) 045020.
- S. Pal, H. Xie, “Parametric dynamic compact thermal model of an electrothermally actuated micromirror,” Journal of Micromechanics and Microengineering, Vol. 19, 065007 (2009).
- K. Jia, S. Pal, H. Xie, “An electrothermal tip-tilt-piston micromirror based on folded dual s-shaped bimorphs,” Journal of Microelectromechanical Systems, vol. 18, pp. 1004-1015 (2009).
Conference Papers:
- S. Pal, H. Xie, “Dynamic Compact Thermal Model of an Electrothermal Micromirror Based on Transmission Line Theory,” Microtech Conference and Expo, Anaheim, CA, USA, June 21-24, 2010.
- S. Pal, H. Xie, “Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.
- K. Jia, L. Wu, S. Pal, D. Hamilton, H. Xie, “Dental Optical Coherence Tomography Employing Miniaturized MEMS-based Imaging Probe,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.
- K. Jia, S. Pal and H. Xie, "An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage", Accepted for Hilton Head, June 2008.
- S. Pal, K. Jia, S. Maley, and H. Xie, “Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device,” to be presented at the SPIE Photonics West Conference, San Jose, CA, 19-24, January, 2008.
- X. Feng, A. Jain, S. Pal, T. Nishida, H. Xie, “LVD micromirror for rapid reference scanning in optical coherence tomography,” Proceedings of the SPIE Photonics West 2007, Jan. 20-25, 2007, San Jose, CA.