Modeling of Electrothermal Micromirrors
Objectives
  • Understanding device behavior as a function of design parameters
  • Improving performance, reliability and repeatability
  • Compact models for efficient and accurate simulations
  • Model generation for device control
Approach
  • The model takes the applied voltage as input and computes the degrees of freedom of the mirror-plate
  • The model may be divided into three submodels — electrothermal, thermal, mechanical

 Figure 1: Comprehensive model schematic of an electrothermal micromirror

  • Thermal modeling
    • Finite element model
    • Numerical reduced order model
    • Parametric lumped element model
    • Distributed model that draws upon similarities between heat flow and signal flow in a transmission line
  • Mechanical model
    • Newtonian approach
    • Lagrangian approach
  • Comprehensive model implementation
    • SIMULINK
    • SPICE
 Accomplishments

Journal Papers:
  • S. Pal, H. Xie, "Pre-shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms," IEEE Journal of Quantum Electronics, In Press, 2010.
  • S. Pal, H. Xie, “Distributed and lumped element models for a bimorph-actuated micromirror,” Journal of Micromechanics and Microengineering, Vol. 20 (2010) 045020.
  • S. Pal, H. Xie, “Parametric dynamic compact thermal model of an electrothermally actuated micromirror,” Journal of Micromechanics and Microengineering, Vol. 19, 065007 (2009).
  • K. Jia, S. Pal, H. Xie, “An electrothermal tip-tilt-piston micromirror based on folded dual s-shaped bimorphs,” Journal of Microelectromechanical Systems, vol. 18, pp. 1004-1015 (2009).
Conference Papers:
  • S. Pal, H. Xie, “Dynamic Compact Thermal Model of an Electrothermal Micromirror Based on Transmission Line Theory,” Microtech Conference and Expo, Anaheim, CA, USA, June 21-24, 2010.
  • S. Pal, H. Xie, “Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.
  • K. Jia, L. Wu, S. Pal, D. Hamilton, H. Xie, “Dental Optical Coherence Tomography Employing Miniaturized MEMS-based Imaging Probe,” Proc. of the 2009 IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, FL, Aug. 17-20, 2009.
  • K. Jia, S. Pal and H. Xie, "An Agile Tip-Tilt-Piston Micromirror With Large Aperture, Large Scanning Range and Low Driving Voltage", Accepted for Hilton Head, June 2008.
  • S. Pal, K. Jia, S. Maley, and H. Xie, “Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device,” to be presented at the SPIE Photonics West Conference, San Jose, CA, 19-24, January, 2008.
  • X. Feng, A. Jain, S. Pal, T. Nishida, H. Xie, “LVD micromirror for rapid reference scanning in optical coherence tomography,” Proceedings of the SPIE Photonics West 2007, Jan. 20-25, 2007,  San Jose, CA.



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